NANOTECH展出SPOES检测设备

2017-3-16  作者:  来源: SEMI中国

核心提示:SPOES(Self Plasma Optical Emission Spectroscopy) 进行实时leak检测和设备monitoring 以及工程 end point detection


1)产品应用在半导体和显示器制造业,进行实时leak检测和monitoring 以及工程 end point detection

2)主要应用在TiCl4、TSN、WN Thin film, W CVD,Ox ALD和PECVD工程的 TEL(如:TRIAS), IPS(TECHO3000/AKRA/BLUETAIN), LAM(ALTUS), AIXTRON(QXP8300), AMAT(PRODUCER-GT/ iSprint), ASMGK(MIR3000), AKT(5.5G), ULVAC(5.5G)

3)具体特点:RF plasma ignition 是0mT~10Torr,In-situ monitoring for 200~850nm,Use highly sensitive CCD sensor(2,048pixels),Advanced EPD algorithms : Fine leak detection algorithm, Life time managemen

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